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Updated: Sun, 10/06/2024 - 10:30

From Saturday, Oct. 5 through Monday, Oct. 7, the Downtown and Macdonald Campuses will be open only to Æ»¹ûÒùÔº students, employees and essential visitors. Many classes will be held online. Remote work required where possible. See Campus Public Safety website for details.


Du samedi 5 octobre au lundi 7 octobre, le campus du centre-ville et le campus Macdonald ne seront accessibles qu’aux étudiants et aux membres du personnel de l’Université Æ»¹ûÒùÔº, ainsi qu’aux visiteurs essentiels. De nombreux cours auront lieu en ligne. Le personnel devra travailler à distance, si possible. Voir le site Web de la Direction de la protection et de la prévention pour plus de détails.

MECH 553 Design and Manufacture of Microdevices (3 credits)

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Offered by: Mechanical Engineering (Faculty of Engineering)

Overview

Mechanical Engineering : Introduction to microelectromechanical systems (MEMS). Micromachining techniques (thin-film deposition; lithography; etching; bonding). Microscale mechanical behaviour (deformation and fracture; residual stresses; adhesion; experimental techniques). Materials- and process-selection. Process integration. Design of microdevice components to meet specified performance and reliability targets using realistic manufacturing processes.

Terms: Winter 2014

Instructors: Vengallatore, Srikar (Winter)

  • (3-0-6)

  • Prerequisite: Instructor's permission.

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