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CHEE 543 Plasma Engineering (3 credits)

Note: This is the 2011–2012 edition of the eCalendar. Update the year in your browser's URL bar for the most recent version of this page, or click here to jump to the newest eCalendar.

Offered by: Chemical Engineering (Faculty of Engineering)

Overview

Chemical Engineering : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.

Terms: This course is not scheduled for the 2011-2012 academic year.

Instructors: There are no professors associated with this course for the 2011-2012 academic year.

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