Seminar and hands on demo: Heidelberg Instrument
Seminar and hands on demo: Heidelberg Instrument: Thermal scanning probe lithography technology (NanoFrazor-tSPL)听
13:00 - 14:00: presentation, Q&A session
14:00 - 16:00: demonstration in cleanroom (everybody needs bunny suits provided by the lab, no shorts and open shoes)
Dear Nanotools Users,听
Our Nanofrazor system will have a major upgrade this month. An Engineer from Heidelberg will give a presentation regarding their unique technology, new capabilities and process development on the system. Here it is the short list of the capabilities of the Nanofrazor, the highlighted parts are the new features after the upgrade.
听All existing nanotools users are welcomed and feel free to spread the message. If you are interested, please send me an email to confirm to your attendance.听
Zhao Lu PhD
Manager
苹果淫院 Nanotools Micro, Nanofabrication Facility
苹果淫院
Address: 3600 University, Montreal, Quebec, Canada
Tel: +1 514 3983310
Email: zhao.lu [at] mcgill.ca
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Main Features:听
High-resolution
Easy patterning of nanostructures even with complex geometries; min. lateral features 15 nm, Vertical resolution 2 nm
Thermal Scanning Probe Lithography
New approach to nanopatterning enabling applications not otherwise feasible
Non-invasive Lithography
No damage from charged particles, no proximity effects, clean lift-off
Compatibility
With all standard pattern transfer methods: lift-off, etching, etc 鈥 knowledge resource and best practices available in our 鈥淩ecipe Book鈥
In-situ Imaging
Immediate control of patterned structures
Precise Overlay and Stitching
Markerless overlay and stitching accuracy 25 nm specified, sub-10 nm overlay shown
Unique Thermal Cantilevers
Integrated microheater and distance sensor; easy to exchange and economical
Laser Sublimation Module
High-throughput exposure of coarse structures in the same exposure step; 405 nm wavelength CW fiber laser